Lineup

Flat panel displays render images with breathtaking sharpness. The Nikon lineup includes models that support the world’s largest plate size, bolstering the global manufacturing of crystalline displays.

  FX-103SH FX-103S
Resolution (L/S) 2.2 µm (g+h+i-line) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.5 µm
Plate size 3,370 mm × 2,940 mm
Takt time 60 sec./plate
Conditions: 3,370 mm × 2,940 mm, 4 scans, g+h+i-line, 30 mJ/cm2
  FX-86SH2 FX-86S2
Resolution (L/S) 2.2 µm (g+h+i-line) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.5 µm
Maximum plate size 2,200 mm × 2,500 mm
Takt time 49 sec./plate
Conditions: 2,200 mm × 2,500 mm, 4 scans, g+h+i-line, 30 mJ/cm2
Resolution (L/S) 1.5 µm (i-line)
Projection magnification 1:1
Overlay ≦ ±0.35 µm
Maximum plate size 1,500 mm × 1,850 mm
Takt time 46 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, 30 mJ/cm2
  FX-67S2 FX-67S
Resolution (L/S) 2.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.5 µm
Maximum plate size 1,500 mm × 1,850 mm
Takt time 57 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
61 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
  FX-66S2 FX-66S
Resolution (L/S) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Overlay ≦ ±0.6 µm
Maximum plate size 1,500 mm × 1,850 mm
Takt time 53 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2
55 sec./plate
Conditions: 1,500 mm × 1,850 mm, 4 scans, g+h+i-line, 30 mJ/cm2

All of the products on this page are under export restriction. The export of these products is controlled by Japanese Foreign Exchange and Foreign Trade Law and International export control regimes. They shall not be exported without authorization from the appropriate governmental authorities.

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